• H.H. Barnum Company | Controls for Factory Automation

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All Products / Chillers / SEMI Standard Chiller / HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant

HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with tap water or deionized water for the coolant.

  • Cooling capacities: 2kW, 4kW, 8kW, 10kW
  • Circulating Fluid: tap water or DI water
  • Temperature range setting: 10 to 60°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
  • Standards: CE, UL, RoHS, SEMI S2, S8, F47
Configuration Options
  
 
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Cooling Capacity Configuration Status
Communication Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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