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All Products / Chillers / SEMI Standard Chiller / HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant

HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  This model includes inverter control of the pump rotations for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.    This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

  • Cooling capacities: 8kW
  • Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
  • Temperature range setting: -20 to 40°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
  • Standards: CE, UL, RoHS, SEMI S2, S8, F47
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